Cleanroom standards for chip manufacturing workshops in the semiconductor industry

1. Cleanroom Grade Standards

The grade of cleanrooms is usually divided according to the number and size of particles allowed in the air. ISO 14644 is usually used internationally for grade classification. According to this standard, the grades of cleanrooms are from high to low: ISO 1-9.

It should be noted that cleanroom standards can vary according to specific industries and applications. In semiconductor chip production, the standard requirements for cleanrooms are usually more stringent to ensure that the quality and performance of the produced chips meet expectations.

The cleanroom grades can be divided into: Grade 1> Grade 10> Grade 100> Grade 1000> Grade 10000> Grade 300000.

Grade 1 cleanrooms are mainly used in the microelectronics industry for manufacturing integrated circuits, and the precision requirements for integrated circuits are submicron.

Grade 10 cleanrooms are mainly used in the semiconductor industry with a bandwidth of less than 2 microns.

Grade 100 cleanliness is widely applicable and can meet the cleanliness needs of most industries. It can be used for aseptic manufacturing technology in the pharmaceutical industry. This cleanroom can be used in surgeries for transplantation and integrator manufacturing, as well as isolation treatment of patients who are particularly sensitive to bacterial infections.

Class 1000 clean rooms are mainly used to produce fine optical products, and are also used to test and assemble aircraft gyroscopes, assemble fine micro bearings, etc.

Class 10,000 clean rooms can be used for the assembly of hydraulic equipment or pneumatic equipment, and in some cases are also used in the food and beverage industry. In addition, Class 10,000 clean rooms are also widely used in the medical industry.

2. Safety considerations

The decoration of semiconductor cleanrooms must meet safety requirements. Generally speaking, there are a large number of flammable and explosive substances in semiconductor cleanrooms, so the relevant national safety regulations, such as fire prevention and explosion prevention, should be observed during decoration. In addition, environmental pollution and the health and safety of staff should also be considered to ensure that the decoration materials meet national standards and will not cause harm to human health.

3. Cleanroom air treatment system

Semiconductor cleanrooms require air treatment systems to ensure the cleanliness of the air in the workshop. The air treatment system is mainly composed of air filters, air supply systems, return air systems and exhaust systems. Among them, air filters are an important component that can effectively remove particulate matter and microorganisms in the air.

4. Floor, wall and ceiling decoration

In the decoration of semiconductor cleanroom, the decoration of floor, wall and ceiling is very important because these areas are susceptible to pollution. The floor should be made of wear-resistant, anti-static and easy-to-clean materials, such as Epoxy self-leveling floor or PVC plastic floor; the walls and ceiling should be made of corrosion-resistant, anti-static and easy-to-clean materials, such as aluminum sandwich panel, stainless steel panel, glass curtain wall, etc.

5. Layout of electrical equipment such as lamps and sockets

In the decoration of semiconductor cleanroom, the layout of lamps and sockets is also very important. In order to prevent pollutants such as dust and microorganisms from entering the workshop, these devices should be installed on the ceiling or above the wall height, anti-static and non-powder-dropping materials should be selected.

6. Doors, windows, clean workbenches and other facilities

In the decoration of semiconductor cleanroom, cleanroom doors, cleanroom windows, clean workbenches and other facilities also need special consideration. Doors and windows must be made of materials with good sealing performance and easy to clean, such as stainless steel doors and windows; clean workbenches should be made of materials that do not drop powder, slag particles, corrosion-resistant and easy to clean, such as stainless steel workbenches.